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micro sf6 structure in SLOVENIA

micro sf6 structure in SLOVENIA

High-aspect-ratio deep Si etching of micro/nano scale.· PDF fileHigh-aspect-ratio deep Si etching of micro/nano scale features with SF6 /H2/ O2 plasma, in a low plasma density reactive ion etching system Z. Sanaee, M. Poudineh, M. Mehran, S. Azimi and S. MohajerzadehAuthor: M Mehran, S Mohajerzadeh, M Poudineh, Z Sanaee

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