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micro sf6 in IRAQ

micro sf6 in IRAQ

EFFECT OF OXYGEN ON SI ETCH PROFILE USING DC SF6 PLASMA.· PDF filePrinted in Iraq First Engineering Scientific Conference College of Engineering –University of Diyala 22-23 December. 2010, pp. 57-66 EFFECT OF OXYGEN ON SI ETCH PROFILE USING DC SF6 PLASMA MICROMACHINING Shrok Abdullah and Abd-allsatar Ali Ministry of Science and Technology, Baghdad – Iraq

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