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best sf6 reaction in CAMBODIA

best sf6 reaction in CAMBODIA

Did anyone have experience in etching SiO2 with SF6 in ICP.oxide is a typical hard mask in ICP/DRIE etching. Oxide is also used as an etch stop for SF6, such as if you have a oxide nitride stack, SF6 is a great etchant to etch the nitride fast and slow a.

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