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Touch gas sf6 in JAPAN

Touch gas sf6 in JAPAN

PFC, HFC, NF3 AND SF6 EMISSIONS FROM SEMICONDUCTOR.· PDF fileSulfur Hexafluoride SF6 3,200 23,900 1.1.1 Description of FFC use Manufacturing semiconductor devices is complex, and FFCs are used at several points in the process3. The manufacturing process begins with a semi-conductive crystalline wafer, usually made of silicon. This waferFile Size: 207KB

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